Micro-mirror with rotor structure

Details Micro-mirror with rotor structure Micro-mirror with rotor structure

2006-03-28

2006-03-28

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S201100, C359S224200, C359S226200, C345S032000

Reexamination Certificate

active

07019876

ABSTRACT:
A micro-mirror device includes a stator structure having a set of radial stator electrodes, a rotor structure having a set of radial rotor electrodes, a mirror mounted on the rotor structure, and a flexure structure suspending the rotor structure relative to the stator structure.

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P.M. Hagelin, U. Krishnamoorthy, R. Conant, R.S. Muller, K.Y. Lau, O. Solgaard, “Integrated Micromachined Scanning Display Systems,” Technical Digest of the 18th Congress of the Int'l Commission for Optics (ICO XVIII), San Francisco, Calif., Aug. 1999, pp. 472-473.

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