Device and system for recording the motion of a wafer and a...

Details Device and system for recording the motion of a wafer and a... Device and system for recording the motion of a wafer and a...

2006-04-18

2006-04-18

Tsai, H. Jey (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C438S018000, C438S050000, C702S117000

Reexamination Certificate

active

07029930

ABSTRACT:
The invention provides a device that can be used to record the motion of a wafer and fine perturbations and vibrations in its motion during its progress through and between semiconductor process and inspection machines in the course of the actual manufacturing process or during a test cycle of the processing or inspection machine. It also provides a system and a method which uses this record mechanical malfunction of the processing or inspection machine which has caused, or could cause, defects in the manufactured wafer whether directly or indirectly.

REFERENCES:
patent: 4745564 (1988-05-01), Siyami et al.
patent: 5444637 (1995-08-01), Smesny et al.
patent: 6410833 (2002-06-01), Brando
patent: 2002/0017708 (2002-02-01), Takagi et al.
patent: 2004/0016995 (2004-01-01), Kuo et al.
patent: 1 014 437 (2000-06-01), None

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