Laser irradiation method, laser irradiation apparatus, and...

Details Laser irradiation method, laser irradiation apparatus, and... Laser irradiation method, laser irradiation apparatus, and...

2006-01-24

2006-01-24

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S235000

Reexamination Certificate

active

06989524

ABSTRACT:
A laser illumination apparatus for illuminating a semiconductor film with a linear laser beam while scanning the semiconductor film with the linear laser beam. An optical system generates a linear laser beam having a beam width W by dividing a pulse laser beam that is emitted from a pulsed laser light source into a plurality of beams vertically and horizontally, and combines divisional beams after they have been processed into a linear shape individually. A mechanism is provided to move a substrate that is mounted with the semiconductor film. A condition W/20≦Δ(r)≦x≦W/5 or Δ(r)≦W/20≦x≦W/5 is satisfied, where r is a height difference of the surface of the semiconductor film, Δ(r) is a variation amount of the beam width W as a function of the height difference r, and x is a movement distance of the substrate during an oscillation period of the pulsed laser light source.

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