System and method for three-dimensional measurement

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Reexamination Certificate

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07027162

ABSTRACT:
An optical measurement system increases the number of translational and angular measurements made with a single laser beam by combining an optical interferometer with an optical autocollimator. Translational measurements are made with an optical interferometer and yaw and pitch measurements are made with an autocollimator. In a preferred embodiment, angular deviations in the reflected measuring beam are minimized with a reverse telescopic lens assembly, allowing a wider range of angular measurements without significant degradation of interferometer accuracy.

REFERENCES:
patent: 3738754 (1973-06-01), Marcy et al.
patent: 6285456 (2001-09-01), Narumi
patent: 6677565 (2004-01-01), Wahl et al.
patent: 2005/0157310 (2005-07-01), Kim et al.

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