Process monitoring using infrared optical diagnostics

Details Process monitoring using infrared optical diagnostics Process monitoring using infrared optical diagnostics

Filed on

2006-09-05

Date issued

2006-09-05

Examiner

Gagliardi, Albert (Department: 2884)

Patent Class

Radiant energy

SubClass

Invisible radiant energy responsive electric signalling

SubSubClass

Infrared responsive

Other Related Categories

C250S341400, C250S339130

Type

Reexamination Certificate

Status

active

Patent number

07102132

Description

ABSTRACT:
A method and apparatus for real-time monitoring of the substrate and the gaseous process environment in a semi-conductor process step is described. The method uses infrared spectroscopy for in-situ analysis of gaseous molecular species in the process region and characterization of adsorbed chemical species on a substrate. The process monitoring can be applied to endpoint- and fault detection in etching and deposition processes, in addition to chamber cleaning and chamber condition steps.

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patent: 01/42767 (2001-06-01), None
patent: WO 2003081216 (2003-10-01), None

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