System for supply and delivery of carbon dioxide with...

Details System for supply and delivery of carbon dioxide with... System for supply and delivery of carbon dioxide with...

2006-07-18

2006-07-18

Doerrier, William C. (Department: 3744)

Refrigeration

Cryogenic treatment of gas or gas mixture

Separation of gas mixture

C062S602000, C062S928000, C062S054200

Reexamination Certificate

active

07076970

ABSTRACT:
A system for the bulk supply and delivery of a carbon dioxide product stream to at least one process tool in a plurality of applications at varying pressure, purity or other process parameter within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of: a carbon dioxide source, a carbon dioxide delivery system containing a low pressure delivery and distribution system, and a plurality of applications containing at least one process tool.

REFERENCES:
patent: 2551399 (1945-12-01), Silverberg
patent: 3317278 (1967-05-01), Siegfried et al.
patent: 4699642 (1987-10-01), Perry et al.
patent: 5237824 (1993-08-01), Pawliszyn
patent: 5377705 (1995-01-01), Smith, Jr. et al.
patent: 5772783 (1998-06-01), Stucker
patent: 5894742 (1999-04-01), Friedt
patent: 5908510 (1999-06-01), McCullough et al.
patent: 6023933 (2000-02-01), Langan et al.
patent: 6327872 (2001-12-01), Boyd et al.
patent: 6612317 (2003-09-01), Costantini et al.
patent: 6688115 (2004-02-01), Gershtein
patent: 2003/0161780 (2003-08-01), Howard et al.
patent: 2005/0155377 (2005-07-01), Gershtein
patent: 2002327895 (2002-11-01), None
patent: WO 03/033114 (2003-04-01), None
patent: WO 03/033428 (2003-04-01), None

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