Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-03-21
2006-03-21
Paladini, Albert W. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S116000
Reexamination Certificate
active
07016753
ABSTRACT:
The present invention has been made in order to construct a CIM system that is capable of reducing burden on a host computer and instructing processing conditions by the unit of substrate and a start order of work by the unit of substrate. In the present invention, a recipe applied to each substrate is managed in each manufacturing apparatus rather than being managed in a host computer. One or a plurality of numbered recipes are stored in each manufacturing apparatus. With the structure described above, even if decision of a recipe and an order of work of a manufacturing apparatus is managed by the unit of substrate rather than by the unit of carrier, since it is unnecessary to manage concrete contents of a recipe for each substrate in each manufacturing apparatus in the host computer, burden on the host computer can be reduced.
REFERENCES:
patent: 4974166 (1990-11-01), Maney et al.
patent: 5432702 (1995-07-01), Barnett
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5570293 (1996-10-01), Tanaka et al.
patent: 6128084 (2000-10-01), Nanbu et al.
patent: 6131052 (2000-10-01), Ban et al.
patent: 6192291 (2001-02-01), Kwon
patent: 6449522 (2002-09-01), Conboy et al.
patent: 6496747 (2002-12-01), Suzuki
patent: 6529792 (2003-03-01), Sato et al.
patent: 6536370 (2003-03-01), Paton et al.
patent: 6591162 (2003-07-01), Martin
patent: 6615098 (2003-09-01), Bode et al.
patent: 6618640 (2003-09-01), Hittner et al.
patent: 6823229 (2004-11-01), Ootani et al.
patent: 2003/0063555 (2003-04-01), Yamazaki
patent: 2004/0093108 (2004-05-01), Ohtani et al.
patent: 02-117512 (1990-05-01), None
patent: 11-53439 (1999-02-01), None
patent: 2001-298077 (2001-10-01), None
Jarrett Ryan A.
Paladini Albert W.
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
LandOfFree
Management system for production line and management method... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Management system for production line and management method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Management system for production line and management method... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3578193