Method for forming a field emission cold cathode

Details Method for forming a field emission cold cathode Method for forming a field emission cold cathode

1998-05-29

2000-03-07

Ryan, Patrick

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 900, H01J 904

Patent

active

060332778

ABSTRACT:
The present invention provides a method for reshaping up a cone-like electrode which is made of a refractory metal containing silicon. The method comprises the following steps. A surface of the cone-like electrode is subjected to an oxidation of silicon which is contained in the refractory metal. The oxidation is generated at rates which increase toward a top portion of the cone-like electrode. As a result, a silicon oxide film is formed, which coats the cone-like electrode. The silicon oxide film has thickness which gradually increase toward a bottom portion of the cone-like electrode. An interface between the silicon oxide film and the cone-like electrode has sloped angles which increase toward the top portion. The silicon oxide film is removed to thereby expose a reshaped cone electrode which has a sharply pointed top. The reshaped cone electrode has a surface having sloped angles which increase toward the sharply pointed top.

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