Method and apparatus to facilitate transport of...

Details Method and apparatus to facilitate transport of... Method and apparatus to facilitate transport of...

2006-01-03

2006-01-03

Yu, Mickey (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S445000, C206S454000, C206S832000, C211S041180

Reexamination Certificate

active

06981594

ABSTRACT:
An assembly to facilitate the transport of semiconductor wafers comprises rigid first and second end plates, and a plurality of interconnected flexible pockets provided between these first and second end plates. Each of the pockets is configured to store a semiconductor wafer therein.A method of facilitating the transport of semiconductor wafers comprises inserting semiconductor wafers into pockets of a wafer transport assembly, the assembly having rigid first and second end plates, and a plurality of interconnected flexible pockets attached therebetween. The method further comprises collapsing the pockets down onto the semiconductor wafers by moving the first end plate toward the second end plate.A method of fabricating an assembly to facilitate the transport of semiconductor wafers comprises providing a plurality of interconnected flexible pockets between rigid first and second end plates, each of these pockets being configured to store a semiconductor wafer therein.

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patent: 6672439 (2004-01-01), Platte, III
patent: 2003/0052039 (2003-03-01), Cu, Jr.

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