Asymmetric spatial light modulator in a package

Details Asymmetric spatial light modulator in a package Asymmetric spatial light modulator in a package

2006-04-25

2006-04-25

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S298000, C359S214100

Reexamination Certificate

active

07034985

ABSTRACT:
Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.

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