Scanner system

Details Scanner system Scanner system

1995-02-09

1996-06-11

Phan, James

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359198, 359212, 359224, 250234, G02B 2608

Patent

active

055261655

ABSTRACT:
A scanner system includes, a tube type piezoelectric scanner having a free end displaceable in X, Y and Z directions and supporting a sample at its free end, a driver for applying voltages to the scanner for displacing the sample, an optical unit for optically detecting the X, Y and Z direction displacements of the free end and for outputting corresponding displacement signals, and a scan controller for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanner to the scanner and for supplying them to the driver.

REFERENCES:
patent: 5172002 (1992-12-01), Marshall
patent: 5210410 (1993-05-01), Barrett
Article entitled Optical Scan-Correction System Applied to Atomic Force Microscopy, by R. C. Barrett and C. F. Quate, Rev. Sci. Instrum. 62(6), Jun. 1991, American Institute of Physics, pp. 1393-1399.

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