Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2006-09-12
2006-09-12
Bali, Vikkram (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S145000
Reexamination Certificate
active
07106895
ABSTRACT:
Disclosed is an apparatus for analyzing a plurality of image portions of at least a region of a sample. The apparatus includes a plurality of processors arranged to receive and analyze at least one of the image portions, and the processors being arranged to operate in parallel. The apparatus also includes a data distribution system arranged to receive image data, select at least a first processor for receiving a first image from the image data, select at least a second processor for receiving a second image from the image data, and output the first and second image portions to their selected processors.
REFERENCES:
patent: 3887762 (1975-06-01), Uno et al.
patent: 4181936 (1980-01-01), Kober
patent: 4253112 (1981-02-01), Doemens
patent: 4445137 (1984-04-01), Panofsky
patent: 4484081 (1984-11-01), Cornyn et al.
patent: 4484349 (1984-11-01), McCubbrey
patent: 4589140 (1986-05-01), Bishop et al.
patent: 4953224 (1990-08-01), Ichinose et al.
patent: 4979223 (1990-12-01), Manns et al.
patent: 4984282 (1991-01-01), Manns et al.
patent: 4985927 (1991-01-01), Norwood et al.
patent: 4999785 (1991-03-01), Schmuter
patent: 5001764 (1991-03-01), Wood et al.
patent: 5018212 (1991-05-01), Manns et al.
patent: 5046110 (1991-09-01), Carucci et al.
patent: 5095447 (1992-03-01), Manns et al.
patent: 5119434 (1992-06-01), Bishop et al.
patent: 5357632 (1994-10-01), Pian et al.
patent: 5495337 (1996-02-01), Goshorn et al.
patent: 5517234 (1996-05-01), Gerber et al.
patent: 5537669 (1996-07-01), Evans et al.
patent: 5608453 (1997-03-01), Gerber et al.
patent: 5621811 (1997-04-01), Roder et al.
patent: 5659630 (1997-08-01), Forslund et al.
patent: 6081659 (2000-06-01), Garza et al.
patent: WO 98/01827 (1998-01-01), None
Goldberg Edward M.
Johnson Erik N.
Miller Lawrence R.
Bali Vikkram
Beyer Weaver & Thomas LLP
KLA-Tencor
LaRose Colin
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