Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate
2006-03-14
2006-03-14
Moore, Margaret G. (Department: 1712)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From silicon reactant having at least one...
C528S029000, C528S028000, C528S025000, C528S031000, C528S039000, C528S043000, C428S447000, C106S287110, C106S287130, C106S287140, C106S287160, C523S137000
Reexamination Certificate
active
07012125
ABSTRACT:
Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic dyes incorporated into spin-on-glass materials. Suitable dyes are strongly absorbing over wavelength ranges around wavelengths such as 248 nm and 193 nm that may be used in photolithography. A method of making dyed spin-on-glass materials includes combining one or more organic dyes with alkoxysilane reactants during synthesis of the spin-on-glass materials.
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JP No. 2001-92122 (P2001-92122A) Apr. 6, 2001.
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Baldwin Teresa
Hacker Nigel P.
Kennedy Joseph
Spear Richard
Bingham McCutchen
Honeywell International , Inc.
Moore Margaret G.
Thompson Sandra P.
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