System and method for defect identification and location...

Details System and method for defect identification and location... System and method for defect identification and location...

2006-04-25

2006-04-25

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S397000

Reexamination Certificate

active

07034930

ABSTRACT:
A measuring system and method are provided for defect identification and location. The system an optical measurement device adapted to view a workpiece along an optical path, and an optical indicia device located in the optical path between the workpiece and the measurement device, which is adapted to provide location information to the system or a user. The location information can be used to correlate defect locations identified in a wafer before and after a process step, as well as between two different wafers. The optical indicia device may further allow the use of field comparison techniques in identifying and locating defects in a blank or unpatterned workpiece. The indicia device may comprise, for example, a transparent member having a grid or other optical indicia patterned thereon, allowing inspection of the workpiece with reference to the optical indicia pattern.

REFERENCES:
patent: 4183614 (1980-01-01), Feldman
patent: 4185298 (1980-01-01), Billet et al.
patent: 4544244 (1985-10-01), Moore
patent: 4633504 (1986-12-01), Wihl
patent: 5218195 (1993-06-01), Hakamata
patent: 5644399 (1997-07-01), Hoshiyama
patent: 6002136 (1999-12-01), Naeem
patent: 6067154 (2000-05-01), Hossain et al.

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