High sensitivity, low noise piezoelelctric flexural sensing...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system

Reexamination Certificate

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Reexamination Certificate

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07104140

ABSTRACT:
A piezoelectric flexural sensing structure having increased sensitivity and decreased noise, without sacrifice of the sensor bandwidth. The structure is made up of a proof mass, a beam with a base and optionally having castellated bonding surfaces and two <011> poled bonding mode PMN-PT crystal plates mounted on the beam.

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patent: 2003/0119220 (2003-06-01), Mlcak et al.
patent: 2004/0095046 (2004-05-01), Ouchi et al.
patent: 2004/0187574 (2004-09-01), Hayashi et al.
patent: 2005/0034519 (2005-02-01), Deng

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