System and method to improve uniformity of ultraviolet...

Details System and method to improve uniformity of ultraviolet... System and method to improve uniformity of ultraviolet...

2006-07-25

2006-07-25

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S50400H

Reexamination Certificate

active

07081638

ABSTRACT:
A UV system, such as used in UV curing of dielectric material, for example, and a method of making the same, has a reflector and a localized UV source positioned at an optical center of the reflector. The window separates the UV source from a work piece. The UV source is on a first side of the window and the work piece is on a second side of the window. A partially reflecting mirror is provided on the first side of the window. The partially reflecting mirror, with the reflector and localized UV source, provides for a maximum amount of UV energy to be provided in a uniformly distributed manner across the plane of the window to the work piece.

REFERENCES:
patent: 4641033 (1987-02-01), Petelin et al.
patent: 4918704 (1990-04-01), Caprara et al.
patent: 6284050 (2001-09-01), Shi et al.
patent: 6465799 (2002-10-01), Kimble et al.
patent: 6862125 (2005-03-01), Warner et al.

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