Method for manufacturing a matrix type actuator

Details Method for manufacturing a matrix type actuator Method for manufacturing a matrix type actuator

2006-01-24

2006-01-24

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S025410, C029S025420, C029S609000, C029S830000, C029S832000, C310S334000

Reexamination Certificate

active

06988301

ABSTRACT:
A matrix type piezoelectric/electrostrictive (P/E) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by the displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.

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