Variable focal length lens comprising micromirrors with two...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S846000

Reexamination Certificate

active

07031046

ABSTRACT:
A micromirror array lens consists of many micromirrors with two degrees of freedom rotation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object converge at one point of image plane. As operational methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. Independent control of each micromirror is possible by known semiconductor microelectronics technologies. The micromirror array can form a lens with arbitrary shape and/or size, as desired.

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Kaneko et al., 2000, “Quick Response Dynamic Focusing Lens using Multi-Layered Piezoelectric Bimorph Actuator,” Proceeding of SPIE vol. 4075: 24-31.
Cho, 2003, “Fast-response Variable Focusing Micromirror Array Lens,” Proceeding of SPIE vol. 5055: 278-286.

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