Alignment apparatus and exposure apparatus

Details Alignment apparatus and exposure apparatus Alignment apparatus and exposure apparatus

2006-05-30

2006-05-30

Perkey, W. B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

Reexamination Certificate

active

07053982

ABSTRACT:
An alignment apparatus includes a first support member having a reference surface which movably supports an object, and a driving unit which moves the object in at least one direction on the reference surface and aligns the object at a predetermined position. The driving unit includes (i) a first driving unit which moves the object in a first direction, and (ii) a second driving unit which moves the object in a second direction, substantially perpendicular to the first direction. The alignment apparatus further includes a second support member which is provided separately from the first support member and supports a heating unit of the driving unit, through a bearing. The first support member supports the object so as to allow the object to move in the first and second directions, and the second support member supports the first and second driving units. The first driving unit has a first movable element which moves the object in the first direction and a first stator which applies a driving force to the first movable element. The second driving unit has a second movable element which moves the object in the second direction and a second stator which applies a driving force to the second movable element. The bearing has a hydrostatic bearing, and the first and second stators are supported on the second support member through the hydrostatic bearing.

REFERENCES:
patent: 5260580 (1993-11-01), Itoh et al.
patent: 6080039 (2000-06-01), Bartlett et al.
patent: 6226073 (2001-05-01), Emoto
patent: 6552773 (2003-04-01), Emoto
patent: 2001/0055102 (2001-12-01), Emoto
patent: 2002/0081528 (2002-06-01), Miyajima et al.
patent: 2002/0088940 (2002-07-01), Watanabe et al.
patent: 2002/0132409 (2002-09-01), Akutsu et al.
patent: 2003/0035088 (2003-02-01), Emoto
patent: 2003/0098962 (2003-05-01), Kubo
patent: 2003/0098966 (2003-05-01), Korenaga et al.
patent: 2004/0080727 (2004-04-01), Emoto
patent: 3145355 (2001-01-01), None
patent: 2001-230178 (2001-08-01), None

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