Position detecting method, position detecting apparatus,...

Details Position detecting method, position detecting apparatus,... Position detecting method, position detecting apparatus,...

2006-01-10

2006-01-10

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000

Reexamination Certificate

active

06985209

ABSTRACT:
In order to find the positional relation between the reference coordinate system XY which defines the movement of a substrate W and the arrangement coordinate system αβ which corresponds to a plurality of divided areas on the substrate W divided by street lines Sα and Sβ, the substrate W and an observation field are moved relatively. By allowing position detecting method marks Mk on the substrate W to visit the observation field, the street lines Sα and Sβ are detected in the observation field during the observation field. According to the results of the detection, an approximate arrangement coordinate system is corrected. The positional relation between the reference coordinate system XY and the arrangement coordinate system αβ is caught with high accuracy enough to allow the observation field to visit the position detection mark (Mk). Thus, by obtaining the arrangement coordinate system of the divided area in high speed with high accuracy, the highly precise exposure might be performed with improved throughput.

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