Thermal mass flow controller having orthogonal thermal mass flow

Details Thermal mass flow controller having orthogonal thermal mass flow Thermal mass flow controller having orthogonal thermal mass flow

1997-03-10

2000-04-04

Patel, Harshad

Measuring and testing

Volume or rate of flow

Proportional

73202, G01F 168

Patent

active

06044701&

ABSTRACT:
A thermal mass flow controller having a thermal mass flow meter with an orthogonal thermal mass flow sensor includes a base defining a primary fluid flow path therein for carrying a flow of fluid to be metered. A pressure dropping bypass is positioned in the primary fluid flow path. A flow measuring portion of a thermal mass flow sensor is oriented substantially transversely or orthogonally with respect to and is in communication with the primary fluid flow path. The flow measuring portion includes a portion of an electrical bridge for determining a temperature of the sensor and produces a mass flow rate signal in response thereto. A valve is connected to an outlet of the primary flow path to control the flow of fluid in response to the mass flow rate signal.

REFERENCES:
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patent: 5080131 (1992-01-01), Ono et al.
patent: 5279154 (1994-01-01), Vavra et al.
PCT Application No. 91/19959, filed Jun. 13, 1991 to Vavra et al.
PCT Written Opinion for International application No. PCT/US93/09907 under PCT Rule 66 dated Jul. 18, 1994.
Notification of Transmittal of International Search Report dated Feb. 28, 1994 for International application No. PCT/US93/09907.

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