Lithographic apparatus and method to detect correct clamping...

Details Lithographic apparatus and method to detect correct clamping... Lithographic apparatus and method to detect correct clamping...

2006-09-19

2006-09-19

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

07110090

ABSTRACT:
A lithographic apparatus includes a support structure adapted to clamp an object. The support structure and the object clamped thereon define a compartment. The supply structure is connected to the compartment and supplies a fluid to the compartment. The supply structure includes a meter to measure a change in at least one of flow velocity of the fluid and pressure of the fluid.

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