Microscope arrangement for inspecting a substrate

Details Microscope arrangement for inspecting a substrate Microscope arrangement for inspecting a substrate

2006-04-25

2006-04-25

Nguyen, Thong Q (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

Reexamination Certificate

active

07035003

ABSTRACT:
A microscope measuring arrangement for inspecting a substrate includes a microscope, an illuminating system, preferably a sight glass, a holder, a substrate pallet and a rotary apparatus and/or tilting apparatus. The substrate pallet can be moved between at least two positions, which lie in the visual ranges respectively of the microscope and the sight glass. The substrate is first subject to an oblique light inspection for finding defect positions by the rotary and/or tilting apparatus. Without having to remove the substrate from the substrate pallet, the microscope to undertake a high-resolution inspection for classifying the defect at the defect position found.

REFERENCES:
patent: 4764969 (1988-08-01), Ohtombe et al.
patent: 6362884 (2002-03-01), Okahira et al.
patent: 2 140 578 (1984-11-01), None
patent: 59-10231 (1984-01-01), None
patent: 2001-305064 (2001-10-01), None
patent: WO 92/01958 (1992-02-01), None
patent: WO 99/21042 (1999-04-01), None
English abstract of the Japanese reference Nos. 9-191036; 61-130811; and 58-033154.

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