Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2006-04-11
2006-04-11
Smoot, Stephen W. (Department: 2813)
Semiconductor device manufacturing: process
Electron emitter manufacture
C313S1030CM
Reexamination Certificate
active
07026177
ABSTRACT:
A replaceable, electronically-isolated, MCP-based spectrometer detector cartridge with enhanced sensitivity is disclosed. A coating on the MCP that enhances the secondary electron emissivity characteristics of the MCP is selected from aluminum oxide (Al2O3), magnesium oxide (MgO), tin oxide (SnO2), quartz (SiO2), barium flouride (BaF2), rubidium tin (Rb3Sn), berrylium oxide (BeO), diamond and combinations thereof. A mass detector is electro-optically isolated the from a charge collector with a method of detecting a particle including accelerating the particle with a voltage, converting the particle into a multiplicity of electrons and converting the multiplicity of electrons into a multiplicity of photons. The photons then are converted back into electrons which are summed into a charge pulse. A detector also is provided.
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Burle Technologies, Inc.
Dann Dorfman Herrell and Skillman, P.C.
Smoot Stephen W.
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