Thin-plate supporting container with filter means

Details Thin-plate supporting container with filter means Thin-plate supporting container with filter means

1998-11-12

2000-03-07

Gehman, Bryon P.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

553854, 206454, 220745, B65D 8542, B01D 4600

Patent

active

060328029

ABSTRACT:
A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit said chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like. The gasket is provided between the container body and the lid for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state while maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber.

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patent: 5873468 (1999-02-01), Ejima et al.

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