Optical element holding system in projection optical system

Details Optical element holding system in projection optical system Optical element holding system in projection optical system

2006-03-21

2006-03-21

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With support

C359S822000, C359S649000

Reexamination Certificate

active

07016126

ABSTRACT:
Disclosed is a simple and compact optical element holding system in a projection optical system which enables correction of astigmatism without causing comatic aberration. The holding system includes a relative angle adjusting system for tilting one of at least two optical elements with respect to an optical axis, and a tilt angle adjusting system for tilting the at least two optical elements integrally, by the same amount as and in an opposite direction to the tilt direction of the relative angle adjusting system, with respect to the optical axis and separately from the relative angle adjusting system.

REFERENCES:
patent: 5864433 (1999-01-01), Takahashi et al.
patent: 5973863 (1999-10-01), Hatasawa et al.
patent: 6179208 (2001-01-01), Feng
patent: 2002/0163738 (2002-11-01), Yoshihara
patent: 10-27743 (1998-01-01), None
patent: 10-54932 (1998-02-01), None

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