Semiconductor device manufacturing machine and method for manufa

Details Semiconductor device manufacturing machine and method for manufa Semiconductor device manufacturing machine and method for manufa

1996-12-09

2000-04-04

Graybill, David E.

Metal working

Plural diverse manufacturing apparatus including means for...

Type of machine

B21F 4100

Patent

active

060445343

ABSTRACT:
A semiconductor device manufacturing machine comprises a mechanism provided in a processing chamber, for lifting up a ring-like peripheral member, and a holder provided at a tip end of a feeding mechanism located in a feeding chamber, and capable of holding either or both a semiconductor wafer and the ring-like peripheral member, so that, in the processing chamber maintained in a vacuum condition, the ring-like peripheral member is lifted up by the lifting mechanism and transferred to the holder of the feeding mechanism, and the ring-like peripheral member held by the holder of the feeding mechanism is moved from the processing chamber through the feeding chamber to a load lock chamber and further can be removed from of the semiconductor device manufacturing machine. Thus, the ring-like peripheral member is held and transferred by the holder for holding and transferring the semiconductor wafer, and therefore, the ring-like peripheral member can be exchanged without breaking the vacuum condition of the processing chamber.

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T. Oomi, "Ultra-clean ULSI Technology," Dec. 15, 1995, pp. 91-96.

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