Illumination system and method allowing for varying of both...

Details Illumination system and method allowing for varying of both... Illumination system and method allowing for varying of both...

2006-07-18

2006-07-18

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C359S694000, C359S696000, C359S676000

Reexamination Certificate

active

07079321

ABSTRACT:
A method and system allow for changing (continuously or variably) both a field height and pupil of a beam that illuminates an object field. In one example, the object field can have a pattern generator (e.g., one or more reticles, spatial light modulators, or the like) positioned therein. The system and method for changing both the field height and the pupil can include a field defining element, a pupil defining element, and first and second zoom systems. The field defining element (FDE) can generate a field height of an illumination beam. The first zoom system can allow for changing of the field height of the illumination beam. The pupil defining element (PDE) can generate a pupil of the illumination beam. The second zoom system can allow for changing of the pupil of the illumination beam.

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