Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Distributive type parameters
Reexamination Certificate
2006-09-05
2006-09-05
Benson, Walter (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Distributive type parameters
C324S633000, C324S765010
Reexamination Certificate
active
07102363
ABSTRACT:
A method and system for non-contact measurements of microwave capacitance of miniature structures patterned on wafers used for production of modern integrated circuits. A near-field balanced two-conductor probe is brought into close proximity to a test key built on a wafer of interest and replicating the miniature structure of interest. The resonant frequency of the probe for the test key is measured. The probe is then positioned at the same distance from an “open” calibration key and “short” calibration key, and the resonance frequencies of the probe for the calibration keys are measured. A shear force distance control mechanism maintains the distance between the tip of the probe and the measured test key and calibration keys. The microwave capacitance of the test key is then calculated in accordance with a predefined formula. The obtained microwave capacitance of the test key is indicative of the capacitance of the miniature structure of interest and may be further used for determining possible defects of the integrated circuit of interest.
REFERENCES:
patent: 5218294 (1993-06-01), Soiferman
patent: 6034535 (2000-03-01), Liberman et al.
patent: 6097205 (2000-08-01), Liberman et al.
patent: 6163163 (2000-12-01), Kohn et al.
patent: 6239603 (2001-05-01), Ukei et al.
patent: 6617864 (2003-09-01), Inoue et al.
Schwartz Andrew R.
Talanov Vladimir V.
Benson Walter
Neocera, Inc.
Rosenberg , Klein & Lee
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