Waveguide type optical device and manufacturing method thereof

Details Waveguide type optical device and manufacturing method thereof Waveguide type optical device and manufacturing method thereof

2006-01-31

2006-01-31

Le, Thien M. (Department: 2876)

Optical waveguides

Planar optical waveguide

Reexamination Certificate

active

06993232

ABSTRACT:
An array waveguide diffraction grating201as waveguide type optical device comprises a planar lightwave circuit203with an optical waveguide layer211formed on a silicon substrate212and having a predetermined thickness h0, a first compensation substrate204bonded to the side of the optical waveguide layer211and having a thickness h1and a second compensation substrate205formed on the silicon substrate212and having a thickness h4. The linear expansion coefficients α1and α4of the two compensation substrates204and205are set to be greater than that of the optical waveguide element203,and highly rigid adhesives are used as a first and a second adhesive214and215.It is thus possible to have the contraction of the optical waveguide element203due to a temperature change increased with the first and second substrates, thus permitting the center frequency setting to a desired value in a predetermined temperature range. Similar effects are obtainable by merely providing a support substrate on the substrate side of the optical waveguide element203.

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Japanese Office Action dated May 18, 2004, with partial English translation.

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