Lithographic actuator mechanism, lithographic apparatus, and...

Details Lithographic actuator mechanism, lithographic apparatus, and... Lithographic actuator mechanism, lithographic apparatus, and...

2006-07-18

2006-07-18

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07079226

ABSTRACT:
The present invention relates to a Lorentz actuator in the context of a lithographic projection apparatus. The present invention improves the thermal performance of a Lorentz actuator over the prior art by employing a plurality of coils, separated by separation layers of high thermal conductivity material in good thermal contact with a cooling element. In this way, heat flows more quickly from hotspot regions near the center of the coils into the cooling element. According to an embodiment of the invention, the cooling element is arranged to be in line with the separation layers so as to optimize the thermal connection between these two members. It is found that splitting a parent coil into two coils provides a practical balance between improved thermal performance and undesirable increases in volume and complexity.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5808381 (1998-09-01), Aoyama et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6005310 (1999-12-01), Mosciatti et al.
patent: 6184596 (2001-02-01), Ohzeki
patent: 2002/0096946 (2002-07-01), Bisschops
patent: 2003/0141769 (2003-07-01), Kubo
patent: 2004/0032170 (2004-02-01), Tamai et al.
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/40791 (1998-09-01), None
European Search Report in reference to EP 03 25 1456, dated Feb. 10, 2004.

Affiliated with

Also associated with

Rating

Lithographic actuator mechanism, lithographic apparatus, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic actuator mechanism, lithographic apparatus, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic actuator mechanism, lithographic apparatus, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3534551