Photocopying – Projection printing and copying cameras – Combined with or convertible to a contact printer
Reexamination Certificate
2006-05-23
2006-05-23
Huff, Mark F. (Department: 1756)
Photocopying
Projection printing and copying cameras
Combined with or convertible to a contact printer
C355S075000, C430S005000
Reexamination Certificate
active
07050144
ABSTRACT:
A photomask for near-field light exposure includes a transparent substrate, and a shading member on the substrate, a mask pattern including at least two apertures with different widths not greater than the wavelength of light from a light source. The shading member has a constant thickness that is set such that differences between light intensities directly below each of the apertures of different widths is 20% or less based on a largest light intensity of the light intensities directly below each of the apertures of different widths. A near-field light exposure apparatus includes a stage that holds the photomask, a light source, a sample table that holds a work substrate provided with a photoresist having a thickness that is less than the wavelength of exposure light, and a means for controlling the distance between the work substrate and the photomask.
REFERENCES:
patent: 6187482 (2001-02-01), Kuroda et al.
patent: 6338924 (2002-01-01), Tsuruma et al.
patent: 1150162 (2001-10-01), None
patent: 8-179493 (1996-07-01), None
patent: 2001-5168 (2000-01-01), None
Inao Yasuhisa
Mizutani Natsuhiko
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