Projection exposure mask, projection exposure apparatus, and...

Details Projection exposure mask, projection exposure apparatus, and... Projection exposure mask, projection exposure apparatus, and...

2006-04-18

2006-04-18

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S077000, C430S005000

Reexamination Certificate

active

07030962

ABSTRACT:
A projection exposure apparatus includes a projection exposure mask. The projection exposure mask includes a first mask pattern for exposing a member to form a continuous pattern thereon and a second mask pattern for exposing the member to form a discontinuous pattern thereon, one of the first and second mask patterns being a reflecting type mask and the other mask pattern being a transmitting type mask pattern, a projection system which projects light from the reflecting type mask pattern and light from the transmitting type mask pattern onto the member, a first illumination system which irradiates light to the reflecting type mask pattern from one side of the projection exposure mask, a second illumination system which irradiates light to the transmitting type mask pattern from the opposite side of the one side of the projection exposure mask, and a substrate stage which moves the member in a direction substantially orthogonal to a projection light axis of the projection system.

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European Search Report dated Sep. 22, 2005, issued in corresponding European patent application No. EP 04 00 1974, forwarded in a Communication dated Sep. 29, 2005.

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