Plasma accelerator system

Details Plasma accelerator system Plasma accelerator system

2006-07-11

2006-07-11

Lee, Wilson (Department: 2821)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C060S202000, C315S111010

Reexamination Certificate

active

07075095

ABSTRACT:
A multistage plasma accelerator system includes at least one intermediate electrode between the plasma chamber between electrodes that include each other. An especially good efficiency can be achieved by way of an uneven distribution of potential to the potential stages formed by the plurality of electrodes having a high potential gradient of the last stage, when the plasma beam emerges, and by a special shape of the magnetic field prevailing in the plasma chamber of the last stage.

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