Liquid level sensor for buffered hydrofluoric acid

Details Liquid level sensor for buffered hydrofluoric acid Liquid level sensor for buffered hydrofluoric acid

1999-05-28

2000-03-07

Williams, Hezron

Measuring and testing

Liquid level or depth gauge

Hydrostatic pressure type

73756, G01F 2300

Patent

active

060325291

ABSTRACT:
An object of the present invention is to prevent erroneous operation of a liquid level sensor due to deposition of ammonium fluoride dissolved in buffered hydrofluoric acid used as a process solution.
The present invention provides a liquid level sensor comprising a chemical solution bath for receiving a chemical solution including buffered hydrofluoric acid, a gas feed tube for introducing a gas for detecting the variation in the liquid level of said chemical solution into said chemical solution, and a gas pressure detector for detecting a change in the pressure of said gas and converting it into an electric signal to indicate a change in liquid level, characterized in that the diameter of a gas outlet provided at an end of said gas feed tube is smaller than the inner diameter of said gas feed tube.

REFERENCES:
patent: 2956581 (1960-10-01), Pearson
patent: 4625548 (1986-12-01), Charter
patent: 5005408 (1991-04-01), Glassey
patent: 5599105 (1997-02-01), Ridley et al.
patent: 5636547 (1997-06-01), Raj et al.
patent: 5661228 (1997-08-01), Young
patent: 5802910 (1998-09-01), Krahn et al.

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