Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Reexamination Certificate
2006-03-28
2006-03-28
Kunemund, Robert (Department: 1722)
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
C117S084000, C117S105000, C117S103000
Reexamination Certificate
active
07018597
ABSTRACT:
The purpose of the invention is to provide a high resistivity silicon carbide substrate with electrical properties and structural quality suitable for subsequent device manufacturing, such as for example high frequency devices, so that the devices can exhibit stable and linear characteristics and to provide a high resistivity silicon carbide substrate having a low density of structural defects and a substantially controlled uniform radial distribution of its resistivity.
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Ellison Alexandre
Janzen Erik
Magnusson Björn
Son Nguyen Tien
Franklin Eric J.
Kunemund Robert
Norstel AB
Venable LLP
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