Methods and apparatus for pressure compensation in a mass...

Details Methods and apparatus for pressure compensation in a mass... Methods and apparatus for pressure compensation in a mass...

2006-07-11

2006-07-11

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

C137S488000, C702S050000

Reexamination Certificate

active

07073392

ABSTRACT:
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.

REFERENCES:
patent: 3532862 (1970-10-01), Dahlin
patent: 3671725 (1972-06-01), Bakke
patent: 3786492 (1974-01-01), Carleton
patent: 4253480 (1981-03-01), Kessel et al.
patent: 4434933 (1984-03-01), Tamura
patent: 4658855 (1987-04-01), Doyle
patent: 4672997 (1987-06-01), Landis et al.
patent: 4679585 (1987-07-01), Ewing
patent: 4877051 (1989-10-01), Day
patent: 4928048 (1990-05-01), Doyle
patent: 4938658 (1990-07-01), Blotenberg
patent: 4947889 (1990-08-01), Ishikawa et al.
patent: 5048332 (1991-09-01), Ishikawa et al.
patent: 5062446 (1991-11-01), Anderson
patent: 5100100 (1992-03-01), Benson et al.
patent: 5107441 (1992-04-01), Decker
patent: 5129418 (1992-07-01), Shimomura et al.
patent: 5141021 (1992-08-01), Shimomura et al.
patent: 5158263 (1992-10-01), Shimizu et al.
patent: 5222417 (1993-06-01), Sato
patent: 5249117 (1993-09-01), Greenough et al.
patent: 5279154 (1994-01-01), Vavra et al.
patent: 5357811 (1994-10-01), Hoang
patent: 5394755 (1995-03-01), Sudo et al.
patent: 5441076 (1995-08-01), Moriya et al.
patent: 5445035 (1995-08-01), Delajoud
patent: 5524084 (1996-06-01), Wang et al.
patent: 5605178 (1997-02-01), Jennins
patent: 5660207 (1997-08-01), Mudd
patent: 5662143 (1997-09-01), Caughran
patent: 5669408 (1997-09-01), Nishino et al.
patent: 5684245 (1997-11-01), Hinkle
patent: 5765283 (1998-06-01), Mudd
patent: 5791369 (1998-08-01), Nishino et al.
patent: 5816285 (1998-10-01), Ohmi et al.
patent: 5850850 (1998-12-01), Mudd
patent: 5865205 (1999-02-01), Wilmer
patent: 5868159 (1999-02-01), Loan et al.
patent: 5878765 (1999-03-01), Lange
patent: 5911238 (1999-06-01), Bump et al.
patent: 5944048 (1999-08-01), Bump et al.
patent: 5950668 (1999-09-01), Baumann
patent: 5975126 (1999-11-01), Bump et al.
patent: 5988217 (1999-11-01), Ohmi et al.
patent: 6044701 (2000-04-01), Doyle et al.
patent: 6074691 (2000-06-01), Schmitt et al.
patent: 6119710 (2000-09-01), Brown
patent: 6128541 (2000-10-01), Junk
patent: 6138708 (2000-10-01), Waldbusser
patent: 6142163 (2000-11-01), McMillin et al.
patent: 6152168 (2000-11-01), Ohmi et al.
patent: 6155283 (2000-12-01), Hansen et al.
patent: 6158679 (2000-12-01), Ohmi et al.
patent: 6178995 (2001-01-01), Ohmi et al.
patent: 6216726 (2001-04-01), Brown et al.
patent: 6217506 (2001-04-01), Phillips et al.
patent: 6289923 (2001-09-01), Ohmi et al.
patent: 6302130 (2001-10-01), Ohmi et al.
patent: 6314992 (2001-11-01), Ohmi et al.
patent: 6343617 (2002-02-01), Tinsley et al.
patent: 6389364 (2002-05-01), Vyers
patent: 6404612 (2002-06-01), Pattantyus
patent: 6445980 (2002-09-01), Vyers
patent: 6449571 (2002-09-01), Tarig et al.
patent: 6450190 (2002-09-01), Ohmi et al.
patent: 6561218 (2003-05-01), Mudd
patent: 6601005 (2003-07-01), Eryurek et al.
patent: 6631334 (2003-10-01), Grosshart
patent: 6640822 (2003-11-01), Tinsley et al.
patent: 6712084 (2004-03-01), Shajii et al.
patent: 6810308 (2004-10-01), Shajii et al.
patent: 6868862 (2005-03-01), Shajii et al.
patent: 2002/0198668 (2002-12-01), Lull
patent: 2003/0234045 (2003-12-01), Shajii et al.
patent: 2003/0234046 (2003-12-01), Shajii et al.
patent: 2003/0234047 (2003-12-01), Shajii et al.
patent: 2003/0234048 (2003-12-01), Shajii et al.
patent: 2003/0236638 (2003-12-01), Shajii et al.
patent: 2003/0236643 (2003-12-01), Shajii et al.
patent: 2004/0204885 (2004-10-01), Wang
patent: 2004/0256003 (2004-12-01), Shajii et al.
patent: 2005/0000570 (2005-01-01), Mohammed et al.
patent: 0 110 325 (1984-06-01), None
patent: 0 281 947 (1988-09-01), None
patent: 0 834 723 (1998-04-01), None
patent: 0 834 723 (1998-04-01), None
patent: 0 890 828 (1999-01-01), None
patent: WO 97/11297 (1997-03-01), None
patent: WO 01/04580 (2001-01-01), None
patent: WO 01/04582 (2001-01-01), None
patent: WO 01/04715 (2001-01-01), None
patent: WO 01/04716 (2001-01-01), None
patent: WO 01/04717 (2001-01-01), None
patent: WO 01/04923 (2001-01-01), None
patent: WO 02/086632 (2002-10-01), None
Tison S.A.: “Accurate Flow Measure In Vaccum Processing” Solid State Technology, Cowan Publ. Corp. Washington, US, vol. 39, No. 10, Oct. 1, 1996, pp. 73-74, 78, 80, 83.

Affiliated with

Also associated with

Rating

Methods and apparatus for pressure compensation in a mass... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods and apparatus for pressure compensation in a mass..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and apparatus for pressure compensation in a mass... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3525629