Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2005-12-06

2005-12-06

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

06972508

ABSTRACT:
A surface acoustic wave device is constructed by forming a piezoelectric thin film on a quartz substrate, and in such a manner that the electromechanical coupling coefficient for a Rayleigh wave, K2, is enlarged. In this surface acoustic wave device, a piezoelectric thin film is disposed on a quartz substrate, and comb electrodes are disposed on the interface between the quartz substrate and the piezoelectric thin film. The normalized film thickness H/λ of the piezoelectric thin film is preferably at least about 0.05.

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