Linear pulse motor, stage apparatus, and exposure apparatus

Details Linear pulse motor, stage apparatus, and exposure apparatus Linear pulse motor, stage apparatus, and exposure apparatus

2005-11-01

2005-11-01

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

06960846

ABSTRACT:
A linear pulse motor includes primary stators (1) in which a plurality of excitation units (3a-3d) and excitation coils (5a-5d) wound on the excitation coils are lined up in a row, and a secondary movable element (12) arranged at a predetermined gap from the stators (1) to face side surfaces of the stators (1). The stators (1) are arranged in a traveling direction of the movable element (12), and the stators (1) and the movable element (12) are supported to be movable relative to each other in the traveling direction of the movable element (12). A plurality of pole teeth (16) arranged on the movable element (12) are partitioned and integrally connected to each other by a nonmagnetic member (17). The secondary movable element is made lightweight and the response performance is improved.

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