Microscale out-of-plane anemometer

Details Microscale out-of-plane anemometer Microscale out-of-plane anemometer

2005-08-02

2005-08-02

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

C073S861850

Reexamination Certificate

active

06923054

ABSTRACT:
A microscale out-of-plane thermal sensor. A resistive heater is suspended over a substrate by supports raised with respect to the substrate to provide a clearance underneath the resistive heater for fluid flow. A preferred fabrication process for the thermal sensor uses surface micromachining and a three-dimensional assembly to raise the supports and lift the resistive heater over the substrate.

REFERENCES:
patent: 4393697 (1983-07-01), Sato et al.
patent: 4538457 (1985-09-01), Gneiss et al.
patent: 4604895 (1986-08-01), Watkins
patent: 4864855 (1989-09-01), Shiraishi et al.
patent: 5020365 (1991-06-01), Gneiss
patent: 5024083 (1991-06-01), Inada et al.
patent: 5148707 (1992-09-01), Inada et al.
Z. Fan, J. Chen, J. Zou, D. Bullen, C. Liu, F. Delcomyn, “Design and Fabrication of Artificial Lateral-Line Flow Sensors,” Journal of Micromechanics and Microengineering, vol. 12, No. 5, pp. 655-661, Sep. 2002.
Y. Ozaki, T. Ohyama, T. Yasuda, I. Shimoyama, “An air flow sensor modeled on wind receptor hairs of insects,” Proc. MEMS 2000, pp. 1-6, Miyazaki, Japan.
F. Jiang, Y.C. Tai, C.M. Ho, and W.J. Li, “A Micromachined Polysilicon Hot-Wire Anemometer,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 13-26, pp. 264-267, 1994.
T. Ebefors, E. Kalvesten, G. Stemme, “Three Dimensional Silicon Triple Hot Wire Anemometer Based on Polyimide Joints” Proc. MEMS '98, pp. 93-98, 1998.
D. Dittmann, R. Ahrens, Z. Rummler, K. Schlote-Holubek, and W.K. Schomburg, “Low-cost flow transducer fabricated with the AMANDA-process,” 11thInternational Conference on Solid-State Sensors and Actuators, Munich, Germany, Jun. 10-14, pp. 1472-1475, 2001.
HD Microsystems, “Pyralin Polyimide Coating for Electronics: P12610 Series—Product Information and Process Guidelines,” HD Microsystems, Jul. 1998.
F. Jiang, Y.C. Tai, C.M. Ho, R. Karan, and M. Garstenauer, “Theoretical and Experimental Studies of Micromachined Hot-Wire Anemometers,” Technical Digest, International Electron Devices Meeting (IEDM), San Francisco, 1994, pp. 139-142.
T. Neda, K. Nakamura, and T. Takumi, “A Polysilicon Flow Sensor For Gas Flow Meters,” Sensors and Actuators A-Physical, vol. A54, No. 1-3, pp. 621-631, Jun. 1996.
J. Zou, J. Chen, C. Liu, and J.E. Schutt-Aine, “Plastic Deformation Magnetic Assembly (PDMA) of Out-of-Plane Microstructures: Technology and Application,” IEEE/ASME Journal of Micro Electromechanical Systems, vol. 10, No. 2, pp. 302-309, Jun. 2001.
A.F. Mayadas, M. Shatzkes and J.F. Janak, “Electrical Resistivity Model For Polycrystalline Films: The Case of Specular Reflection at External Surfaces.” Applied Physics Letters, vol. 14, p. 343-347, 1969.
S. Sedky et al., “Experimental Determination of the Maximum Post-Process Annealing Temperature for Standard CMOS Wafers,” IEEE Transactions on Electron Devices, vol. 48, No. 2, pp. 377-385, 2001.
J. Chen, J. Zou, and C. Liu, “ A Surface Micromachined, Out-of-Plane Anemometer,” Proceedings MEMS, Las Vegas, 2002, pp. 332-335.
S.A. Chambers and K.K. Chakravorty, “ Oxidation at the Polyimide/Cu Interface,” Journal of Vacuum Science and Technology A—Vacuum Surfaces & Films, vol. 6, No. 5, pp. 3008-3011, Sep. 1988.
Y. Nakamura, Y. Suzuki, and Y. Watanabe, “ Effect of Oxygen Plasma Etching on Adhesion Between Polyimide Films and Metal,” Thin Solid Films, vol. 290, pp. 367-369, 1996.
P.D. Weidman and F.K. Browand, “ Analysis of a Simple Circuit for Constant Temperature Anemometry,” Journal of Physics E—Scientific Instruments, vol. 8, No. 2, pp. 553-560, Jul. 1975.

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