Method and apparatus for on-wafer testing of an individual...

Details Method and apparatus for on-wafer testing of an individual... Method and apparatus for on-wafer testing of an individual...

2005-08-02

2005-08-02

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

Optical fiber waveguide with cladding

Utilizing nonsolid core or cladding

C385S123000

Reexamination Certificate

active

06925238

ABSTRACT:
A method for testing an optical chip, while the optical chip is still on a wafer, utilizing an optical probe, includes the steps of creating an access point on the wafer adjacent the optical chip. The optical chip having a waveguide having an axis. A portion of the waveguide is removed to form the access point such that light exiting the planar optical waveguide is directed in a direction substantially different from the axis of the waveguide. An optical probe is placed along a propagation path of the exiting light to optically couple the optical probe and optical chip.

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Yasuhiro Kuwana, signal Propagation Characteristics in Polyimide Optical Wave-guide with Micro-Mirrors for Optical Multichip Module, Japanese Journal of Applied Physics. vol. 38 (1999) pp. 2660-2663, Part 1, No. 4B, Apr. 1999.

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