Integrated inductor

Details Integrated inductor Integrated inductor

2005-02-15

2005-02-15

Nguyen, Tuyen T. (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

C336S083000, C336S232000, C257S531000

Reexamination Certificate

active

06856228

ABSTRACT:
An inductor comprises a substrate comprising a semiconductor material, a first dielectric layer over the substrate, a magnetic layer over the first dielectric layer, a second dielectric layer over the magnetic layer, and a conductor over the second dielectric layer.

REFERENCES:
patent: 3607462 (1971-09-01), Liang et al.
patent: 3881244 (1975-05-01), Kendall
patent: 3905883 (1975-09-01), Hanazono et al.
patent: 4543553 (1985-09-01), Mandai et al.
patent: 4791719 (1988-12-01), Kobayashi et al.
patent: 4797648 (1989-01-01), Kaneko et al.
patent: 4816784 (1989-03-01), Rabjohn
patent: 5047296 (1991-09-01), Miltenberger et al.
patent: 5095357 (1992-03-01), Andoh et al.
patent: 5121852 (1992-06-01), Wilkes
patent: 5420558 (1995-05-01), Ito et al.
patent: 5446311 (1995-08-01), Ewen et al.
patent: 5469399 (1995-11-01), Sato et al.
patent: 5530415 (1996-06-01), Takaya et al.
patent: 5583474 (1996-12-01), Mizoguchi et al.
patent: 5609946 (1997-03-01), Korman et al.
patent: 5635892 (1997-06-01), Ashby et al.
patent: 5694030 (1997-12-01), Sato et al.
patent: 5705287 (1998-01-01), Doerner et al.
patent: 5801100 (1998-09-01), Lee et al.
patent: 5834825 (1998-11-01), Imai
patent: 5877533 (1999-03-01), Arai et al.
patent: 5892425 (1999-04-01), Kuhn et al.
patent: 5952704 (1999-09-01), Yu et al.
patent: 5961746 (1999-10-01), Nepela
patent: 5976715 (1999-11-01), Chen et al.
patent: 6031445 (2000-02-01), Marty et al.
patent: 6033782 (2000-03-01), Hubbard et al.
patent: 6037649 (2000-03-01), Liou
patent: 6040226 (2000-03-01), Wojnarowski et al.
patent: 6067002 (2000-05-01), Fujino et al.
patent: 6103136 (2000-08-01), Han et al.
patent: 6114937 (2000-09-01), Burghartz et al.
patent: 6121852 (2000-09-01), Mizoguchi et al.
patent: 6166422 (2000-12-01), Qian et al.
patent: 6191495 (2001-02-01), Kossives et al.
patent: 6201287 (2001-03-01), Forbes
patent: 6207303 (2001-03-01), Tomita
patent: 6240621 (2001-06-01), Nellissen et al.
patent: 6281560 (2001-08-01), Allen et al.
patent: 6291305 (2001-09-01), Huang et al.
patent: 6404317 (2002-06-01), Mizoguchi et al.
patent: 6441715 (2002-08-01), Johnson
patent: 0 295 028 (1988-12-01), None
patent: 0 884 783 (1988-12-01), None
patent: 0 725 407 (1996-08-01), None
patent: 61020311 (1986-01-01), None
patent: 06124843 (1994-05-01), None
patent: 06-124843 (1994-06-01), None
patent: 07-272932 (1995-10-01), None
patent: WO 0139220 (2001-05-01), None
ROC (Taiwan) Patent Publication No. 378417 published Jan. 1, 2000.
ROC (Taiwan) Patent Publication No. 411481 published Nov. 11, 2000.
ROC (Taiwan) Patent Publication No. 386310, published Apr. 1, 2000.
Tomita, H, et al., “Oblique-Field Annealing Effect For In-plane Magnetic Anisotropy of Soft Magnetic CO-NB-ZR Thin Films”, IEEE Transactions On Magnetics, pp. 1336-1339, May 30, 1994, vol. 30, No. 30, IEEE, Inc., New York.
Gardner, et al., “High Frequency (GHz) and Low Resistance Integrated Inductors using Magnetic Materials,” 3 pages, IEEE 2001, Intel Corporation, Components Research, Santa Clara, California, Department of Materials Science and Engr., Stanford University, no month.
K. Shirakawa, et al., “Thin Film Cloth-Structured Inductor For Magnetic Integrated Circuit,” IEEE Transactions on Magnetics, Sep. 1990, pp. 2262-2264, vol. 26, No. 5.
M. Yamaguchi, et al., “Characteristics Of Magnetic Thin-Film Inductors At Large Magnetic Field,” IEEE Transactions on Magnetics, Nov. 1995, pp. 4229-4231, vol. 31, No. 6.
E. Brandon, et al., “Microinductors For Spacecraft Power Electronics,” Magnetic Materials, Processes, and Devices VI Applications to Storage and Microelectromechanical Systems (MEMS), 2001, pp. 559-567, vol. 2000-29, The Electrochemical Society, Inc., Pennington, New Jersey, no month.
S.S. Mohan, et al., “Simple Accurate Expressions For Planar Spiral Inductances,” IEEE Journal of Solid-State Circuits, Oct. 1999, pp. 1419-1424, vol. 34, No. 10.
Jae Yeong Park, et al., “Batch-Fabricated Microinductors With Electroplated Magnetically Anistropic and Laminated Alloy Cores,” IEEE Transactions on Magnetics, Sep. 1999, pp. 4291-4300, vol. 35, No. 5.
M. Yamaguchi, et al., “MGHz-Drive Magnetic Thin-Film Inductors For RF Integrated Circuits Using Micro-Patterned Granular Film” IEEE, 1990, no month.
Ali M. Niknejad and Robert G. Meyer, “Analysis, Design, and Optimization of Spiral Inductors and Transformers for Si RF IC's,” IEEE Journal of Solid-State Circuits, Oct. 1998, pp. 1470-1481, vol. 33, No. 10.
Donald S. Gardner and Paul A. Flinn, “Mechanical Stress As A Function Of Temperature For Aluminum Alloy Films,” Journal of Applied Physics, Feb. 15, 1990, pp. 1831-1845, vol. 67.
M. Baba, et al., “GHz-Drive Magnetic Thin-Film Inductor Using CoNbZr Film,” Journal of the Magnetics Society of Japan, 2000.
Y. Kobayashi, et al., “New Type Micro Cloth-Inductor And Transformer With Thin Amorphous Wires And Multi-Thin Coils,” IEEE Transactions on Magnetics, Sep. 1992, pp. 3012-3014, vol. 28, No. 5.
H. Matsuki and K. Murakami, “A New Cloth Inductor Using Amorphous Fiber,” IEEE Transactions on Magnetics, Sep. 1985, pp. 1738-1740, vol. MAG-21, No. 5.
V. Korenivski and R.B. Van Dover, “Magnetic Film Inductors For Radio Frequency Applications,” Journal of Applied Physics, Nov. 15, 1997, pp. 5247-5254, vol. 82.
M. Yamaguchi, et al., “Microfabrication And Characteristics Of Magnetics Thin-Film Inductors In The Ultrahigh Frequency Region,” Journal of Applied Physics, Jun. 1, 1999, pp. 7919-7922, vol. 85, No. 11.
John R. Long and Miles A. Copeland, “The Modeling, Characterization, And Design Of Monolithic Inductors For Silicon RF IC's,” IEEE Journal of Solid-State Circuits, Mar. 1997, pp. 357-369, vol. 32, No. 3.
M. Yamaguchi, et al., “Magnetic Thin-Film Inductor For RF Integrated Circuits,” Extended Abstracts of the 1999 International Conference on Solid-State Devices and Materials, 1999, pp. 580-281, Tokyo, no month.
T. Sato, et al., “New Applications of Nanocrystalline Fe(Co-Fe)-Hf-O Magnetic Films To Micromagnetic Devices,” Journal of Applied Physics, Jun. 1, 1998, pp. 6658-6660, vol. 83, No. 11.
A. Fessant, et al., “Influence Of In-Plane Anisotropy And Eddy Currents On The Frequency Spectra Of The Complex Permeability Of Amorphous CoZr Films,” IEEE Transactions of Magnetics, Jan. 1993, pp. 82-87, vol. 29, No. 1.
S. Yabukami, et al., “Noise Analysis Of A MHz-3 GHz Magnetic Thin Film Permeance Meter,” Journal of Applied Physics, Apr. 15, 1999. pp. 5148-5150, vol. 85. No. 8.
Masahiro Yamaguchi, “Magnetic Films For Planar Inductive Components And Devices,” Handbook of Thin Film Devices, edited by M.H. Francombe, 2000, pp. 185-186, vol. 4: Magnetic Thin Film Devices.
S.S. Mohan, et al., “Bandwidth Extension In CMOS With Optimized On-Chip Inductors,” IEEE Journal of Solid-State Circuits, Mar. 2000, pp. 346-355, vol. 35, No. 3.
Terence O'Donnel, et al., “Microtransformers and Inductors Using Permalloy Thin Films,” Preparation, Properties, and Applications of Thin Ferromagnetic Films, Jun. 2000, pp. 45-52.
C. Patrick Yue and S. Simon Wong, “On-Chip Spiral Inductors With Patterned Ground Shields For Si-Based RF IC's,” IEEE Journal of Solid-State Circuits, May 1998, pp. 743-752, vol. 33, No. 5.

Affiliated with

Also associated with

Rating

Integrated inductor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated inductor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated inductor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3508904