Method of forming an out-of-plane structure

Details Method of forming an out-of-plane structure Method of forming an out-of-plane structure

2005-02-01

2005-02-01

Arbes, Carl J. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S874000, C029S876000, C029S882000

Reexamination Certificate

active

06848175

ABSTRACT:
Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the springs used to form out-of-plane structures are constrained via a tether to avoid bunching and entanglement. The high yield structure may be used in numerous electronic applications such as filter circuits.

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