Space-saving test structures having improved capabilities

Details Space-saving test structures having improved capabilities Space-saving test structures having improved capabilities

2005-06-21

2005-06-21

Lefkowitz, Edward (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S525000, C324S763010, C257S048000

Reexamination Certificate

active

06909293

ABSTRACT:
A space-saving test structure includes a core metal line, at least one extrusion detection line and an extrusion monitoring segment. The core metal line has a “non-linear configuration” and is capable of conducting current for an electromigration test, an isothermal test, and extrusion monitoring. The at least one extrusion detection line is situated adjacent to the core metal line. The extrusion monitoring segment is electrically connected to the at least one extrusion detection line. The extrusion monitoring segment is adapted to determine whether an extrusion occurs in the core metal line by measuring a resistance between the core metal line and the at least one extrusion detection line.

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