Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-06-14
2005-06-14
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S214100, C359S223100, C359S224200, C359S230000, C359S877000, C073S504020, C073S504040, C073S504120, C073S504140, C257S415000
Reexamination Certificate
active
06906849
ABSTRACT:
A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with a frame, a moving portion having a mirror portion, and a torsion bar connecting the frame to the moving portion. The wiring substrate is provided with a wiring pattern. The electroconductive spacer separates the micro-mirror substrate from the wiring substrate and also electrically connects the frame to the wiring pattern. The wiring substrate has a surface that faces the micro-mirror substrate. A detector is provided on this surface for detecting the pivot angle of the mirror portion.
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Mi Xiaoyu
Sawaki Ippei
Soneda Hiromitsu
Ueda Satoshi
Armstrong Kratz Quintos Hanson & Brooks, LLP
Ben Loha
Fujitsu Limited
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