Optical element with alignment mark, and optical system...

Optics: measuring and testing – By alignment in lateral direction

Reexamination Certificate

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C430S022000, C359S569000

Reexamination Certificate

active

06856392

ABSTRACT:
A diffractive optical element having a design wavelength λ, includes a diffractive surface for diffracting predetermined light corresponding to the design wavelength, and a mark shaped so that, with regard to the predetermined light, a phase difference corresponding to a multiple, by an integer, of the design wavelength λ is produced between (i) a light ray, of the predetermined light, as transmitted through or reflected by the mark and (ii) a light ray, of the predetermined light, as transmitted through or reflected by a portion adjacent to the mark, and that, with regard to second light of a second wavelength λ′ different from the design wavelength λ, no phase difference corresponding to a multiple, by an integer, of the second wavelength λ is produced between (a) a light ray, of the second light, as transmitted through or reflected by the mark and (b) a light ray, of the second light, as transmitted through or reflected by a portion adjacent to the mark.

REFERENCES:
patent: 4614433 (1986-09-01), Feldman et al.
patent: 4636077 (1987-01-01), Nomura et al.
patent: 5161059 (1992-11-01), Swanson et al.
patent: 5294980 (1994-03-01), Matsugu et al.
patent: 6120950 (2000-09-01), Unno
patent: 0 455 443 (1991-11-01), None
patent: 04-236416 (1992-08-01), None
patent: 07-253528 (1995-10-01), None
patent: 08083747 (1996-03-01), None
patent: 10-135118 (1998-05-01), None
US Patent Application Publication US 2003/0043462 A1, Sekine, filed Oct. 1, 1999, published Mar. 6, 2003.

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