Alignment method and parameter selection method

Details Alignment method and parameter selection method Alignment method and parameter selection method

2005-12-06

2005-12-06

Shah, Kamini (Department: 2142)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S094000, C378S163000, C700S125000

Reexamination Certificate

active

06973397

ABSTRACT:
A method of aligning an object. The method includes the steps of detecting an image of a mark on the object, obtaining a position of the mark based on the detected image, extracting a feature of the mark based on the detected image, and correcting the detected position based on the extracted feature.

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patent: 63-232321 (1988-09-01), None
patent: 4-3413 (1992-01-01), None
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