Control system and control unit

Details Control system and control unit Control system and control unit

2005-06-28

2005-06-28

Paschall, Mark (Department: 3742)

Electric heating

Heating devices

With power supply and voltage or current regulation or...

C219S483000, C219S506000, C219S497000, C392S416000

Reexamination Certificate

active

06911628

ABSTRACT:
A control unit, which divides a controlled system into a plurality of zones and carries out control of the individual zones separately, can match the timings for the zones to reach a steady-state reference temperature by basic control. It can effectively reduce overshoot and undershoot after reaching the steady-state reference temperature, and suitably control the temperature of a wafer in the fabrication process of semiconductor devices.

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