Positioning system and exposure apparatus having the same

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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Details

C355S072000, C355S076000, C310S010000, C310S012060, C318S649000

Reexamination Certificate

active

06965426

ABSTRACT:
Disclosed is a positioning system effective to cancel a moment reaction force, and it includes a movable portion and a reaction force absorbing mechanism for absorbing a propulsion reaction force to be produced by motion of the movable portion. A first distance between a reference plane and a gravity center position of the movable portion, being supported for movement along the reference plane, and a second distance between the reference plane and a gravity center position of the reaction force absorbing mechanism are made substantially equal to each other, and/or the second distance and a third distance between the reference plane and a motor movable element for propelling the movable portion along the reference plane are made substantially equal to each other.

REFERENCES:
patent: 6151100 (2000-11-01), Yamane et al.
patent: 6266133 (2001-07-01), Miyajima et al.
patent: 6449030 (2002-09-01), Kwan
patent: 6583859 (2003-06-01), Miyajima et al.
patent: 2004/0051854 (2004-03-01), Tanaka et al.
patent: 62-88526 (1987-04-01), None

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