Shallow trench isolation process

Details Shallow trench isolation process Shallow trench isolation process

2005-11-01

2005-11-01

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Thin active physical layer which is

Heterojunction

C257S018000, C257S338000, C257SE29193

Reexamination Certificate

active

06960781

ABSTRACT:
A structure including a transistor and a trench structure, with the trench structure inducing only a portion of the strain in a channel region of the transistor.

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